1、Product Overview
This water-soluble dewaxing fluid is specially used for cleaning wax, residual oil stains (such as
polishing fluid), and fine solid particles after the grinding and polishing process of sapphire
wafers and other semiconductor materials, as well as after the back grinding and thinning
process of LED wafers.
Its formula has undergone repeated research, development and optimization, integrating a
variety of special chemical active ingredients. It can perfectly replace acetone, and can quickly
dissolve and peel off wax without damaging the precise structure and performance of the chip,
ensuring that the chip surface meets extremely high cleanliness standards and providing reliable
guarantee for the subsequent manufacturing processes of the chip.
2、Product Features
2.1 Excellent Wax Removal Efficiency
It has strong dissolving ability for various common waxes used in chip processing, such as
temporary fixing wax. It can quickly penetrate into the interior of the wax, destroy its molecular
structure, make it emulsify and disperse quickly, achieve efficient removal in a short time, and
significantly improve production efficiency.
2.2 High Material Compatibility
It fully considers various sensitive materials involved in chip manufacturing, such as silicon,
germanium, aluminum, gallium and their compound semiconductors, as well as various metal
wires and insulating layers. The product has undergone a large number of rigorous compatibility
tests to ensure that while effectively removing wax, it will not cause corrosion, oxidation, swelling
or other physical and chemical damage to any part of the chip, so as to maximize the
performance and yield of the chip.
2.3Adopting advanced purification technology and formula design, the ion content of the wax
remover itself is extremely low. During and after the cleaning process, almost no ionic impurities
will remain on the chip surface, effectively avoiding problems such as chip short circuit, leakage
and signal interference caused by ion residue, and meeting the strict requirements of chip
manufacturing for ultra-clean environment.
2.4 Adhesive Gas pollution
It can reduce the problem of "adhesive gas pollution" to a certain extent by improving the
cleanliness of the chip surface.
2.5 Environmental Protection and Safety
In the research and development process, it follows the concept of green chemistry, selects
environmentally friendly raw materials, and does not contain harmful heavy metals (such as lead,
mercury, cadmium, etc.), halogenated hydrocarbons and persistent organic pollutants. The
product has a mild odor, and the volatile substances are minimally harmful to human health. It
meets the standards of occupational health and safety during use, and also reduces
environmental pollution.
III. Technical Parameters
Appearance: Yellow transparent liquid
pH value: 7.5 ---9.5
Density: 0.9350 - 1.030 g/cm³
Boiling point: ≥ 103℃
Flash point: None (non-flammable, safe to use)
3、Scope of Application
It is suitable for cleaning wax deposits, oil stains, dust and grinding fluid/polishing fluid in the
production of precision industry products such as semiconductors and optical devices, and can
perfectly replace acetone.
4、Cleaning Process Recommendations for Water-Soluble Dewaxing Fluid HF-DW-03A
| De-waxing |
Rinsing |
Drying |
Bank 1#
HF-DW-03ATemp:50+5'C
Time :6 M
Ultrasonic+
Swing |
Bank 2#
HF-DW-03A
Temp:50+5C
Time: 6 M
Ultrasonic +
Swing |
Bank 3#
QDR
Room
temperature |
Bank 4#QDRRoomtemperature |
Bank 5#IPARoomtemperature |
Bank 6#
Spin Dry |
Remarks:
5.1、The actual cleaning process can be optimized according to the customer's on-site conditions.
5.2、It is used as stock solution directly. The verified service life is 0.35g wax per wafer, with a
setting of 100 pieces of 4-inch wafers per liter. Later, it can be optimized according to the
actual amount of applied wax and process conditions.
5.3、For Tanks 3 and 4, please use disposable deionized water for sufficient rinsing to remove
residual dewaxing fluid.
5.4、When this fluid is heated to 50℃, its color will darken, but this does not affect the cleaning
ability, nor will it cause thermal decomposition or other problems. It is a normal
phenomenon that the surfactant changes with temperature, and the color will return to
normal when it is restored to room temperature.
6、Packaging
Professional chemical HDPE/PP plastic barrels are used, and iron barrels or galvanized barrels are
never used to avoid ion pollution to the chip.
Specifications: 200 liters and 25 liters.
7、Precautions
Incompatible with strong oxidants and acids.
8、Storage and Transportation
Since this cleaning agent is non-toxic, non-irritating and non-flammable, it can be transported
and stored as ordinary chemicals.
Store in a cool, dry and ventilated room in a sealed container, and seal it well after each opening;
Avoid strong oxidants, acids, high-temperature environments, direct sunlight, rain, etc., and keep
away from fire sources.
9、Shelf Life
The shelf life is one year under the original packaging conditions.